New Molecular Beam Epitaxy (MBE) SiGe chamber fully
functional at IHP materials research laboratory
“Molecular beam epitaxy (MBE)” is a very flexible, cost effective and accurate thin film deposition technique used in the IHP materials research department for advanced materials science studies. Traditionally, the 4” MBE facility at the IHP materials research laboratory is a single deposition chamber system equipped with various evaporation sources for dielectric materials. Besides on-line RHEED diagnostics, a UHV transfer system is installed to transfer in-situ the samples to the photoelectron spectroscopy chamber (XPS & UPS). However, progress in the field of Si-based technology requires more and more the preparation of complex materials systems. For example, “man-made” functional stack systems like semiconductor – insulator – semiconductor structures are studied to tune the electronic properties via strain engineering and quantum confinement approaches. The upgrading of our MBE system by a second growth chamber (shown in the image), exclusively dedicated to SiGe film deposition, enables us to address these more complex tasks in a professional way. Besides the quantitative aspect of having more materials in-situ available, the newly installed chamber will also qualitatively improve our work by avoiding undesired cross contamination effects.
print version
23-04-08
Materials Science Lectures from IHP Materials Scientists online available
Materials Scientists from IHP-Microelectronics regularly embark during the academic year for teaching ... [more]
05-03-08
Advanced Silicon Materials Research for Electronic and Photovoltaic Applications
Strasbourg, France
May 25-31, 2008 [more]
24-09-07
DPG 2008 Spring Meeting. IHP Materials Scientists will organize a Symposium on high-k dielectrics in Silicon based Micro- and Nanoelectronics [more]
23-07-07
New BMBF “MEGAEPOS” project starts at IHP
IHP Materials Research Department under the guidance of Dr. Hans – Joachim Müssig is a partner in ... [more]
20-07-07
DFG funds new research projects at IHP
DFG recently approved the funding of new research projects in IHP Materials Research Department. ...[more]
22-11-06
PhD defense of Grzegorz Lupina at BTU Cottbus
After three years at the Materials Research department of IHP – Microelectronics in Frankfurt (Oder), our colleague ... [more]
22-11-06
New Molecular Beam Epitaxy (MBE) SiGe chamber fully functional at IHP materials research laboratory
“Molecular beam epitaxy (MBE)” is a very flexible, cost effective and accurate thin film deposition technique used ...[more]
07-06-06
Workshop on “Microelectronics meets Catalysis: Innovative Oxide Materials“.
Prof. M. Bäumer from the University of Bremen and Dr. Thomas Schroeder from IHP-Microelectronics in Frankfurt – Oder organize an Exploratory Workshop on Innovative Oxide Materials Systems nowadays of interest in catalytic as well as microelectronic applications. [more]
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