Technical Basis
The following tools are currently being used:
Thin Film Growth and Treatment Facilities
Molecular Beam Epitaxy (MBE), Molecular Organic Chemical Vapour Deposition (MO-CVD) and Rapid Thermal Annealing (RTA)
Spectroscopy
Micro-Raman-Spektroscopy, X-ray photoelectron spectroscopy (XPS), Ultraviolet photoelectron spectroscopy (UPS), Scanning Nanoprobe Auger electron spectroscopy (AES), Sputter-XPS, Time-of-flight Secondary Mass Ion Spectroscopy (Tof-SIMS), Dynamic SIMS, Synchrotron Radiation-XPS (Bessy II)
Diffraction
Low Energy Electron Diffraction (LEED), Reflection High Energy Electron Diffraction (RHEED) equipped with video registration, High Resolution X-ray Diffraction (HR-XRD), X-ray Reflectometry (XRR), Synchrotron Radiation Grazing Incidence X-ray diffraction (GI-XRD) (ESRF)
Microscopy
Variable Temperature Scanning Tunneling Microscopy (VT-STM), Combined Scanning Tunnelling Microscopy (STM) and Atomic Force Microscopy (AFM), Photoelectron Emission Microscopy (PEEM), Transmission Electron Microscopy (TEM), Dual Focussed Ion Beam – Scanning Electron Microscope (Dual FIB SEM)
Electrical Characterization
Capacitance versus voltage (C-V), Current versus voltage (J-V), Variable temperature - current versus voltage & dielectric relaxation studies (VT-JV & VT-DR), Hall–Device
Further methods are available upon request.
print version
23-04-08
Materials Science Lectures from IHP Materials Scientists online available
Materials Scientists from IHP-Microelectronics regularly embark during the academic year for teaching ... [more]
05-03-08
Advanced Silicon Materials Research for Electronic and Photovoltaic Applications
Strasbourg, France
May 25-31, 2008 [more]
24-09-07
DPG 2008 Spring Meeting. IHP Materials Scientists will organize a Symposium on high-k dielectrics in Silicon based Micro- and Nanoelectronics [more]
23-07-07
New BMBF “MEGAEPOS” project starts at IHP
IHP Materials Research Department under the guidance of Dr. Hans – Joachim Müssig is a partner in ... [more]
20-07-07
DFG funds new research projects at IHP
DFG recently approved the funding of new research projects in IHP Materials Research Department. ...[more]
22-11-06
PhD defense of Grzegorz Lupina at BTU Cottbus
After three years at the Materials Research department of IHP – Microelectronics in Frankfurt (Oder), our colleague ... [more]
22-11-06
New Molecular Beam Epitaxy (MBE) SiGe chamber fully functional at IHP materials research laboratory
“Molecular beam epitaxy (MBE)” is a very flexible, cost effective and accurate thin film deposition technique used ...[more]
07-06-06
Workshop on “Microelectronics meets Catalysis: Innovative Oxide Materials“.
Prof. M. Bäumer from the University of Bremen and Dr. Thomas Schroeder from IHP-Microelectronics in Frankfurt – Oder organize an Exploratory Workshop on Innovative Oxide Materials Systems nowadays of interest in catalytic as well as microelectronic applications. [more]
[more news]
