Technical Basis
The key asset is a state-of-the-art pilot line in a 1,000 m2 class-1 clean room with a 24 h / 7 days per week mode of operation.
The Toolset is capable for 0.13 ΅m technology on 200 mm wafers. Cycle times are typically 2 days per mask level. Processing times from tape-in to the shipment of diced chips are about 10 weeks, depending to some extent on the technology used.
Key equipment for processing and inline measurement in the pilot line includes:
I-line and DUV (248 nm laser exposure) photolithography
CMP in front-end of line (oxide, poly Si) and back-endof line (oxide, tungsten)
Dry etch processes for standard CMOS and BiCMOS process modules
PVD (Co, Al, Ti, TiN) and CVD (W, TiN) for the Al metallization system
PECVD (inclusive HDP) and SACVD for deposition of dielectrics in front-end of line and
back-end of line
Wet etch and wet cleaning processes required for 0.13 ΅m technology level
Low temperature Si, SiGe, SiGe:C epitaxy (differential, and selective epitaxy)
Standard high temperature Si epitaxy
Low to medium energy and low to high dose ion implantation
(As, B, P, In, Sb, Si, Ge, F, Ar)
Oxidation, LPCVD (including low temperature oxide and nitride), and annealing in
standard batch systems
RTP for annealing, oxidation, and silicidation
Inline measurements for CD, overlay, thickness, resistance, defectivity, topology
(SEM, AFM), and XRD
Parametric test using two fully automatic test systems
The following key methods are employed for offline diagnostics and analytics, electrical measurements, and reliability tests:
SIMS, TEM, SEM, AES, XRD, XRR, XPS, AFM, and FTIR
DC Parameter set-up for on-wafer and packaged device measurements
LF Noise setup for 1/f noise on wafer measurements
Ring oscillator set-up for on-wafer and packaged device measurements
S-Parameter/DC/RF-noise equipment for on-wafer measurement
S-Parameter/DC equipment for parameter extraction, device modeling
Digital tester for digital/mixed signal functional test
MOS-CV/IV equipment for DC/CV characterization
Load Pull system
Universal Microwave setup
Tester for intrinsic reliability tests for technology qualification
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