IHP - Innovations for High Performance Microelectronics: XRR & HRXRD simulation

XRR and HRXRD simulation and fitting program RCRefSimW

RCRefSimW is a state of the art program to simulate reflectivity curves (XRR) of thin layers and diffraction curves (HRXRD) of single crystals with thin strained layer structures including an automatic curve fitting procedure.

RCRefSimW allows the rocking curve simulation for (multi)layer and superlattice
structures with different types of deformation models that can be modified in many
ways, as well as the simulation of reflectivity curves for different thin layer structures.

RCRefSimW (diffraction part) uses by choice the dynamical or semi-kinematical theory
to calculate the reflection curves in symmetrical and asymmetrical Bragg case geometry

RCRefSimW uses the SIMPLEX algorithm for fitting. The fitting process is stopped
automatically when a certain limit of the SIMPLEX parameters is reached. Different
features guaranty the convergence if fitting.

RCRefSimW considers by choice s- and p-polarization, or only one of the two (e.g. for
synchrotron radiation).

Experimental files (ASCII) from different diffractometer manufacturers can be read as
well as files of simple X-Y data pairs.

The points that are to be used for fitting the experimental curve can be selected
explicitly.

Deformation profiles obtained can be shown graphically and printed out or saved into
files for further use as a strain profile or as concentration profiles of an alloy component
(e.g. Ge concentration in SiGe layers).

It is possible to create different archives (according to the areas of interest) with curves
analyzed already and the corresponding deformation (layer) profiles. The archive can be
used to find optimal starting condition for the fitting of new experimental curves.

For superlattice structures, an additional variation of SL lattice constant and
deformation is considered over the layer stack.

Special wishes of a customer may be considered to some extent.

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