IHP - Innovations for High Performance Microelectronics: Process Module Support

Process Module Support

IHP offers support for advanced process modules for research and development purposes and small volume prototyping.

Process modules available include:

Standard processes (implantation, etching, CMP & deposition of layer stacks such as
thermal SiO₂, PSG, Si₃N₄, Al, TiN, W);

Epitaxy (Si, Si:C, SiGe, SiGe:C)

Optical lithography (i-line and 248 nm down to 100 nm structure size);

Short-flow processing.

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