Process Module Support

 

IHP offers support for advanced process modules for research and development purposes and small volume prototyping.

 

Process modules available include:

 

  • Standard processes (implantation, etching, CMP & deposition of layer stacks such as
        thermal SiO2, PSG, Si3N4, Al, TiN, W);

  • Epitaxy (Si, Si:C, SiGe, SiGe:C)

  • Optical lithography (i-line and 248 nm down to 100 nm structure size);

  • Short-flow processing.

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    www.ihp-microelectronics.com