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The Objective
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Metal-Insulator-Metal (MIM) capacitors are valuable in many applications, which are focused in radio frequency (RF) circuits and mixed signal applications. The high-k Metal-Insulator-Metal (MIM) capacitor BEOL integration into mixed signal and RF circuits is characterized by the efforts toward increasing the capacitance density, reducing the leakage current density and improving the voltage linearity. In particular, the achievement of sufficient capacitance voltage linearity in high-k MIM capacitors is still a challenge. more
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