IHP offers support for advanced process modules for research and development purposes and small volume prototyping. Process modules available include:
- Standard processes (implantation, etching, CMP & deposition of layer stacks such as thermal SiO2, PSG, Si3N4, Al, TiN, W);
- Epitaxy (Si, Si:C, SiGe, SiGe:C);
- Optical lithography (i-line and 248 nm down to 100 nm structure size);
- Short-flow processing.