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MIMIRAWE

Millimeter Wave Radar for Space Application

Zielstellung

  • System design and the realization of a near 100 GHz radar transceiver
  • The functionality will be realized by hetero-integrated circuits based on BiCMOS (IHP) and III-V bipolar (FBH) technology.
  • The MIMIRAWE project will use the advantages of SciFab, where the cooperation between FBH and IHP is used to realize high performance hetero-integrated MMICs.
  • Radiation hardness of SiGe and InP devices will be investigated in this project.

Beitrag des IHP

  • Using IHPs SG25H1 technology as technical base for SiGe – InP heterogeneous integration by a Back-End-of-Line wafer bonding approach
  • The SG25H1 flow was specially adapted for wafer bonding.
     - Backside bond alignment marks
     - Planarization of TM2 level
     - 3” wafer sawing
  • Some dedicated SiGe circuit building blocks (e.g. a 42 GHz PLL-VCO) have to be designed, fabricated and tested and finally integrated into the system design.

Finanzierung

BMWi

Projektpartner

  • Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik FBH
  • Goethe-University Frankfurt (Main)
Das Gebäude und die Infrastruktur des IHP wurden finanziert vom Europäischen Fonds für regionale Entwicklung, von der Bundesregierung und vom Land Brandenburg.