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Process Module Support

IHP offers support for advanced process modules for research and development purposes and small volume prototyping. Process modules available include:

  • Standard processes (implantation, etching, CMP & deposition of layer stacks such as thermal SiO2, PSG, Si3N4, Al, TiN, W);
  • Epitaxy (Si, Si:C, SiGe, SiGe:C);
  • Optical lithography (i-line and 248 nm down to 100 nm structure size);
  • Short-flow processing.

 

 

 

Das Gebäude und die Infrastruktur des IHP wurden finanziert vom Europäischen Fonds für regionale Entwicklung, von der Bundesregierung und vom Land Brandenburg.