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XRR and HRXRD simulation and fitting program RCRefSimW

RCRefSimW is a state of the art program to simulate reflectivity curves (XRR) of thin layers and diffraction curves (HRXRD) of single crystals with thin strained layer structures including an automatic curve fitting procedure.

  • RCRefSimW allows the rocking curve simulation for (multi)layer and superlattice structures with different types of deformation models that can be modified in many ways, as well as the simulation of reflectivity curves for different thin layer structures.
  • RCRefSimW (diffraction part) uses by choice the dynamical or semi-kinematical theory to calculate the reflection curves in symmetrical and asymmetrical Bragg case geometry.
  • RCRefSimW uses by choice two different algorithms for fitting. The fitting process can be stopped anytime or it is stopped automatically when a certain limit of the fitting parameter is reached. Different features guaranty the convergence if fitting.
  • RCRefSimW considers by choice s- and p-polarization, or only one of the two (e.g. for synchrotron radiation).
  • Experimental files (ASCII) from different diffractometer manufacturers can be read as well as files of simple X-Y data pairs.
  • The points that are to be used for fitting the experimental curve can be selected explicitly.
  • Deformation profiles obtained can be shown graphically and printed out or saved into files for further use as a strain profile or as concentration profiles of an alloy component (e.g. Ge concentration in SiGe layers).
  • It is possible to create different archives (according to the areas of interest) with curves analyzed already and the corresponding deformation (layer) profiles. The archive can be used to find optimal starting condition for the fitting of new experimental curves.
  • The material and wavelength data base can be enlarged by the user himself.
  • Special wishes of a customer may be considered to some extent.
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