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Passives MIM

Passives MIM

High-k dielectric for future MIM capacitors in mixed signal ICs

Objective

Metal-Insulator-Metal (MIM) capacitors are valuable in many applications, which are focused in radio frequency (RF) circuits and mixed signal applications. The high-k Metal-Insulator-Metal (MIM) capacitor BEOL integration into mixed signal and RF circuits is characterized by the efforts toward increasing the capacitance density, reducing the leakage current density and improving the voltage linearity. In particular, the achievement of sufficient capacitance voltage linearity in high-k MIM capacitors is still a challenge.

IHP`s Contribution

The materials research department at the IHP is a key player in the field of rare earth high-k dielectric films, i.e. Praseodymium (Pr)- based dielectrics are developed.

Funding

This project is funded by IHP.

Project Partners

  • IHP
  • Aixtron

External Links

The building and the infrastructure of the IHP were funded by the European Regional Development Fund of the European Union, funds of the Federal Government and also funds of the Federal State of Brandenburg.