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  • MEMS Varaktor

MEMS Varaktor

Micro-electro-mechanical-systems varaktor


  • Realization of MEMS varactors with high capacitance ratio and broad analog tuning range for the application in wideband RF VCO frequency tuning up to 6 GHz.
  • Integration of MEMS varactors into IHPs high performance SiGe:C BiCMOS technology SG13S to allow monolithic integration of high-end varactor and active core into one silicon die
  • Implementation of the developed MEMS varactor into a commercial RF VCO for demonstration of a MEMS varactor based  RF VCO with wide tuning range and low phase noise performance

IHP's Contribution

  • Support industry partner in MEMS varactor design and modeling
  • Process integration and wafer fabrication in IHPs pilot line
  • Mechanical, electrical and RF-characterization using IHPs measurement facilities


This project is industrial funded by Rohde & Schwarz GmbH & Co. KG.

Project Partners

Rohde & Schwarz GmbH & Co. KG

Selected Publications

(1) M. Kaynak, V. Valenta, H. Schumacher, B. Tillack, „MEMS Module Integration into SiGe BiCMOS Technology for Embedded System Applications“, Proc. IEEE Bipolar / BiCMOS Circuits and Technology Meeting, (BCTM 2012), 49 (2012)

(2) G. Kahmen, M. Kaynak, M. Wietstruck, B. Tillack, H. Schumacher, „MEMS Varactor with High RF Power Handling Capability for Tuning of Wideband Low Noise RF VCOs“, Proc. European Microwave Week 2014, 207 (2014)

(3) G. Kahmen, M. Wietstruck, M. Kaynak, B. Tillack, H. Schumacher, „Static and dynamic characteristics of a MEMS Varactor with broad analog capacitive tuning range for wideband RF VCO applications“, European Microwave Week 2015 (submitted)

The building and the infrastructure of the IHP were funded by the European Regional Development Fund of the European Union, funds of the Federal Government and also funds of the Federal State of Brandenburg.