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Ultra-small high-speed modulator for photonic-integrated circuits


  • Integration of photonic and microelectronic circuits on a single silicon chip
  • Development of an electro-optic modulator into a powerful demonstrator
  • SILIMOD activities are based on previous achievements, where the world’s smallest electro-optical modulator with an innovative design and modulation speed up to 25 Gbit/s has been demonstrated
  • An integrated demonstrator consisting of an optical chip modulator elements and a chip with the drive electronics available, which will meet the requirements of standard specifications

IHP's Contribution

  • Process development and manufacturing modulator
  • Performing periodic process runs for integrated process development and device optimization process of the modulator
  • Contributions to the work package driver development, in which a modulator driver is designed and manufactured
  • Participation in the work package demonstrator structure, where the successful optimize and merged tested modulators and the driver circuits are


The SILIMOD project is supported by the German Federal Ministry for Education and Research in the framework of the "validation of the innovation potential of scientific research - VIP" funded by the project sponsor VDI / VDE / IT.

Project Partners

Technische Universität Berlin, Institut für Optik und Atomare Physik

Selected Publications

(1) S. Meister, H. Rhee, A. Al-Saadi, B.A. Franke, S. Kupijai, C. Theiss, L. Zimmermann, B. Tillack, H.H. Richter, H. Tian, D. Stolarek, T. Schneider, U. Woggon, H.J. Eichler, "Matching p-i-n-junctions and optical modes enables fast and ultra-small silicon modulators", Optics Express, Vol. 21, Issue 13, pp. 16210-16221 (2013).

(2) S. Meister, H. Rhee, A. Al-Saadi, B.A. Franke, S. Kupijai, C. Theiss, H.J. Eichler, B. Tillack, L. Zimmermann, H.H. Richter, D. Stolarek, M. Lesny, C. Meuer, C. Schubert, U. Woggon, silicon optical modulator with 3 µm diode, 2014 IEEE Optical Interconnects Conference, San Diego, CA; 4-7 May 2014.

The building and the infrastructure of the IHP were funded by the European Regional Development Fund of the European Union, funds of the Federal Government and also funds of the Federal State of Brandenburg.