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Process Module Support

IHP offers support for advanced process modules for research and development purposes and small volume prototyping. Process modules available include:

  • Standard processes (implantation, etching, CMP & deposition of layer stacks such as thermal SiO2, PSG, Si3N4, Al, TiN, W);
  • Epitaxy (Si, Si:C, SiGe, SiGe:C);
  • Optical lithography (i-line and 248 nm down to 100 nm structure size);
  • Short-flow processing.




The building and the infrastructure of the IHP were funded by the European Regional Development Fund of the European Union, funds of the Federal Government and also funds of the Federal State of Brandenburg.