General Technology Description

IHP offers standard 0.13 and 0.25 μm CMOS processes which provide NMOS, PMOS, isolated NMOS and passive components such as poly resistors and MIM capacitors. In addition to the standard CMOS processes different front-end-of-line options are offered. In 0.25 μm CMOS the standard aluminum BEOL backend offers 3 thin metal layers and two TopMetal layers (TopMetal1 - fourth 2 μm thick metal layer, TopMetal2 – fifth 3 μm thick metal layer). The Al-BEOL backend for 0.13 μm process offers 5 thin and 2 thick metal layers (TM1: 2 μm TM2: 3 μm). Together with a high dielectric stack this enables increased performance of the passive RF components.

Technologies with an enhanced copper BEOL option are offered.

Technologies for MPW & Prototyping

A cadence-based mixed signal design kit is available. For high frequency designs an analogue Design Kit in ADS can be used. IHP's reusable blocks and IPs for wireless and broadband are offered to support your designs. 

The following Modules are available

2.1 MPW Price Information 2026

Non-Commercial Access

For European non-profit and educational institutions, special discounts are offered for research projects via EUROPRACTICE. 

2.1.1 Prices for Technologies 

2.1.2 Prices for Modules

2.2 MPW Schedule

TAPE IN time is given in the column “TAPE IN”, shipment time in the corresponding table cells.

2.2.1 2027 schedule for complete technologies

* Runs with priority
** Optional runs only available if a minimum area is ordered
OS  Open-Source MPW Runs indicated in column “TAPE IN” with special conditions, which you can find here. 

Local Backside Etching (LBE) is only offered for S and G2 technology (not for Open Source Runs), shipment will be 21 days later than the standard shipment.

2.2.2 2027 BEOL (only)/Interposer runs

Aluminum Backend of Line Runs SG13 BEOL and IntM4TM2 are offered for passive structures and interposer designs only. For SG13 BEOL Metal1 and all layers above are produced. IntM4TM2 contains M4 to TM2 metal layer MIM capacitor and a ThinFilm resistor. On request Local Backside Etching (LBE) is offered for these runs. 

** Optional runs only available if a minimum area is ordered
OS  Open-Source MPW Runs indicated in column “TAPE IN” with special conditions, which you can find here. 

There might be internal runs, without confirmed schedule. Feel free to ask our customer support for more details if you are interested in joining such runs.

2.2.3 2028 schedule for complete technologies

* Runs with priority
** Optional runs only if a minimum area is ordered
OS  Open-Source MPW Runs indicated in column “TAPE IN” with special conditions, which you can find here. 

Local Backside Etching (LBE) is only offered for S and G2 technology (not for Open Source Runs), shipment will be 21 days later than the standard shipment. 

2.3 Information on Minimum Area per MPW Run

There is a minimum area requirement of only 0.8 mm² for selected technologies or module in schedule tables in chapter 2.2 and 2.3. This is valid for all technologies or modules marked with bold shipment times. For all technologies or modules marked with grey italic shipment times in brackets, minimum area order as given in the following table is required. A registration 4 weeks before TAPE out, followed by the confirmation from the foundry, is necessary in this case. By default these additional runs are without priority. A combination of 0.25 μm based runs and 0.13 μm based runs is not possible.

¹ Ask for special price if you need more than this area for one MPW run.

Delivery

As default 40 diced samples will be delivered. Exceptions are designs using TSV module and SG25_H7PIC. Here 25 samples will be delivered by default. The delivery includes E-test data and RF measurements.

Back lapping options:

• 200 µm (no additional fee)
• 300 µm (no additional fee)
• 250 µm (additional fee)
• 150 µm (additional fee)
• 100 µm (additional fee)
• 75 µm (for TSV module only)

Research Engineering Runs

IHP is offering complete mask sets only for research purpose and prototyping. If customer specific modules are added to a qualified technology, this technology is considered as non-qualified with status “early access”. Prices for Research Engineering Runs can be given upon request.

IHP's General Terms and Conditions »

For further information please contact:

Dr. René Scholz

Phone: +49 335 5625 647
Fax: +49 335 5625 327
Send e-mail »