Process development

Process and device developments for novel "More-​than-Moore" technologies are based on an 8” Si technology platform. Process developments from different areas (e.g. CVD, ALD, etching, diffusion, etc.) are used for advanced device concepts that show high compatibility to CMOS technology, such as SiGe and Ge for high frequency and photonic applications. Additionally new research fields like neuromorphic computing based on fully integrated memrestive cells or epitaxially modified substrates for quantum technologies are investigated within this competence area. In addition, approaches for the integration of new materials for the functional extension of Si technologies are another focus of the research work.

Research Topics

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